Heidelberg Instruments selected to supply its Maskless Aligner technology to the Stanford Nanofabrication Facility

Heidelberg, Germany, September 02, 2016: Heidelberg Instruments announces the placement of a new order for a MLA150 Maskless Aligner to the Stanford Nanofabrication Facility (SNF).

The MLA150 is a high performance Maskless Aligner especially designed for the needs of universities and R&D labs with fast throughput and high alignment accuracy. It can be used for first layer exposures but also for alignment in multilayer applications. 


About Stanford Nanofabrication Facility: The SNF hosts a multi-user laboratory providing a state-of-the-art fabrication infrastructure. With its 10,000 sq ft cleanroom, the SNF is an open-use resource, which helps academic, industrial, and governmental researchers from around the globe achieve their scientific research goals in areas of optical devices, new semiconductor materials, MEMs/NEMS and many other applications.

About Heidelberg Instruments, GmbH: With an installation base of over 650 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high precision laser and maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Heidelberg Instruments GmbH


Phone: +49 6221 3430 0


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