Heidelberg Instruments receives order for an advanced VPG Large Area Volume Pattern Generator
Heidelberg, Germany, June 1, 2017: Heidelberg Instruments, GmbH, leading supplier of maskless aligner and laser lithography systems, announced the order for an advanced VPG Large Area Volume Pattern Generator from a major Japanese based production group.
The VPG 800 is capable of patterning an area of up to 800 mm by 800 mm and is configured to produce sub-micron structures at a high throughput with an address grid of 10 nm. The system will be employed in the production of advanced photomasks used in fabrication of MEMS and micro optics devices, as well as touch panel screens.
“We are very excited about this contract. Japan continues to be a major market for our production tools and we have seen great activity in capital equipment spending by technology companies in the world's third-largest economy,” states Alexander Forozan, Head of Global Sales and Business Development.
About Heidelberg Instruments, GmbH: With an installation base of over 750 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in the production of high-precision laser and maskless lithography systems. Due to their flexibility, power and versatility, these systems are employed for direct writing and photomask production in a wide range of settings and applications in research, development, and industry. Customers include some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, nanotechnology, ASICS, TFT, displays, micro optics, and many other related applications.