Heidelberg Instruments chosen to equip U.S. Army Research Laboratory in Maryland

Heidelberg, Germany, November 21, 2016: Heidelberg Instruments announced it has been selected by the U.S. Army Research Laboratory (ARL) to install and service its customized High Resolution VPG 200+ Lithography System in their Specialty Electronic Materials and Sensors Cleanroom (SEMASC) facility. The new Direct Write Lithography System from Heidelberg Instruments will be replacing the facility’s conventional stepper technology. Based on the industry-proven VPG platform, the VPG 200+ is capable of writing substrates up to 200mm x 200mm with a minimum feature size down to 500 nm in less than 6 hours. The U.S. Army booked the order for the equipment in the third quarter of its fiscal year 2016.


About Army Research Lab: The U.S. Army Research Laboratory (ARL) of the U.S. Army Research Development and Engineering Command (RDECOM) is the Army’s main laboratory. It conducts scientific, technical, and analytical research to provide innovative solutions for the current and future Army. Its diverse assortment of unique facilities and dedicated workforce of government and private sector partners make up the largest source of world-class integrated research and analysis in the Army.

About Heidelberg Instruments GmbH: With an installation base of over 700 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high precision laser and maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Heidelberg Instruments GmbH


Phone: +49 6221 3430 0


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