Heidelberg Instruments announced order for multiple advanced maskless lithography systems by major Asian based production units

Heidelberg, Germany, July 10, 2014:  Heidelberg Instruments, GmbH, a leading supplier of maskless aligner and laser lithography systems, announced multiple orders for VPG 200 advanced maskless aligner tools from Asian based microelectronic production facilities.  Systems will be used for rapid proto typing and mid volume production of sensors and MEMS devices.

The VPG 200 introduces Heidelberg Instruments’ most advanced small and midsize Maskless Aligner Systems currently available on the market.  Because of the high exposure speed, the VPG 200 can be used as a Maskless Aligner for direct exposure on wafers. As an example, a 4” wafer can be processed in less than 2 minutes, eliminating the need for photomasks and traditional mask aligner tools as well as supporting equipment, saving significant production cost.

About Heidelberg Instruments, GmbH:  With an installation base in over 40 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems.  These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.


Heidelberg Instruments, GmbH

Email:  info@himt.de

Phone:  +49 6221 3430 0


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