UFRGS - Instituto de Fisica Microelectronics Laboratory, Brazil chooses a μPG 101 for micro scale patterning to support their research
Heidelberg, Germany, May 12, 2014: Heidelberg Instruments announced the sale of a μPG 101 direct write optical lithography system to the Universidade Federal do Rio Grande do Sul, UFRGS (Federal University of Rio Grande do Sul) in Porto Alegre, Brazil.
UFRGS is the latest among a growing number of universities and research institutes in Brazil, who use systems from Heidelberg Instruments for their micro patterning needs.
The μPG 101 is an economical and easy to use micro pattern generator for direct writing applications and low volume mask making. The system can be used for applications such as MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.
About the UFRGS Microelectronics Laboratory: The UFRGS Microelectronics Laboratory is located on the premises of the Institute of Physics of the UFRGS and provides the infrastructure and support to engage students and researchers to conduct in the highest levels of semiconductor and microelectronics research.
About Heidelberg Instruments GmbH: With an installation base in over 40 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments GmbH
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