Heidelberg Instruments to support micro and nano research at Chongqing Institute of Green and Intelligent Technology, China

Heidelberg, Germany, February 04, 2013: Heidelberg Instruments announced the sale of an advanced DWL 66FS maskless aligner system to Chongqing Institute of Green and Intelligent Technology (CIGIT), China.

The DWL 66FS maskless aligner system is capable of binary and gray scale exposure, layer to layer alignment, and is able to produce sub micron features.  DWL 66FS maskless aligner system will replace the traditional mask aligner systems at CIGIT facilities and will be used for various research activities in MEMS and Nano areas.

About Chongqing Institute of Green and Intelligent Technology: Chongqing Institute of Green and Intelligent Technology (CIGIT) was established in southwest China’s Chongqing Municipality to promote progress and innovation in areas of electronic information, intelligent manufacturing and ecological environment. According to the blueprint, its phase-I construction started in mid 2011 and will finish in the end of 2013, by when three institutes under the CIGIT will be set up. The Institute of Electronic Information will be aimed to crack down key technologies in intellisense, intelligent control and massive information processing, and in the meanwhile, try best to make electronic information products energy-saving and environmental friendly. Its research directions include green information system, services for cultural and creative industry, cloud computing and automotive electronics. The Institute of Intelligent Manufacturing will be engaged in such areas like intelligent industrial design, green manufacturing technology, agile manufacturing technology and intellectual instruments and smart sensors. As for the Institute of Environmental Engineering, its focus will be set on the large-scale reservoirs located in areas with a complex man-land relation and environmental construction and protection of Three Gorges reservoir area. A system of prevention technology, equipment and management of environmental protection will be developed to help solve the problems popping up in the increasingly speeding-up industrialization and urbanization in Chongqing.

About Heidelberg Instruments, GmbH:  With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems.  These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

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