Heidelberg Instruments to deliver a maskless lithography system to the Massachusetts Institute of Technology
Heidelberg, Germany, March 10, 2011: Heidelberg Instruments announced the sale of an advanced Lithography System to the Nano Structures Laboratory at the Massachusetts Institute of Technology, USA.
The maskless lithography system will be equipped with binary and gray scale exposure capabilities, layer to layer alignment, raster and vector scanning technology. System will be used for fabricating various nano devices.
About Heidelberg Instruments GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.