Heidelberg Instruments brings professional Direct Lithography to IFW Dresden with the new Maskless Aligner MLA100
Heidelberg, Germany, May 02, 2016: The Leibniz Institute for Solid State and Materials Research Dresden, Institute for Integrative Nano-sciences (IFW Dresden-IIN), Germany just installed the new Maskless Aligner MLA100 in the central IFW class ISO 5 clean room facility.
The facility is used by many different research groups and covers all micro patterning processes from Frontend to Backend and Packaging, whereas the lithography belongs to one of the three core competences. The IFW pushes many cutting edge research projects ranging from flexible smart micro-tubes for sensor and actuator applications, magneto-electronics and wavelength-tunable quantum light sources over ultra-sensitive lab-in-a-tube systems to compact on-chip energy storage devices and autonomous micro-/nano-robotic systems.
Dr. Stefan Harazim, head of the cleanroom at the IFW Dresden-IIN said, “Our research activities at the IFW Dresden-IIN cover a wealth of modern topics in the Nanosciences. As such we require the very best research equipment, and chose Heidelberg Instruments for their excellent capabilities in direct lithography, versatility and customer support. The MLA100 is already our fourth direct writing system from Heidelberg Instruments (1x DWL 66, 2x µPG 501). The proven flexibility of their direct writing tools made the MLA100 a ‘system of choice’ for IFW Dresden-IIN’s integration work.”
In general, the easy transfer of new or modified pattern to substrates, even as multi-layer process, without the need for an extra photomask makes the whole process very cheap and fast in research. Many of the users are working with small substrate sizes like 10 by 10 mm2 in dimension. By utilizing the MLA100 it is already faster than comparable commercial manual mask aligners. No need to say, that an edge bead removal for small substrates is not required anymore.
About Heidelberg Instruments, GmbH: With an installation base of over 650 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Phone: +49 6221 3430 0
About IFW Dresden: The Leibnitz Institute for Solid State and Materials Research in Dresden, Germany in a non-university research institute. As a member of the Leibniz Association it is engaged in modern materials science and combines explorative research in physics, chemistry and materials science with technological development of new materials and products. Founded in 1992, IFW employs about 530 people, among them 200 scientists, mostly physicists, chemists and materials engineers. 120 young scientists work in the IFW on their doctoral thesis. About 100 guest scientists from all over the world come every year for some weeks or months to work at the IFW.