Heidelberg Instruments announced order for an advanced VPG maskless lithography system from the Swiss Federal Institute of Technology (EPFL)
Heidelberg, Germany, April 18, 2014: Heidelberg Instruments, GmbH, a leading supplier of maskless aligner and laser lithography systems, announced order for a VPG 200 advanced maskless aligner system from the MicroNanoTechnology (CMi) Center at EPFL, Switzerland.
The VPG 200 introduces Heidelberg Instruments’ most advanced small and midsize Maskless Aligner Systems currently available on the market. Because of the high exposure speed, the VPG 200 can be used as a Maskless Aligner for direct exposure on wafers or any other flat substrates coated with photosensitive material. As an example, a 4” wafer can be patterned in less than 2 minutes, eliminating the need for photomasks and mask aligner tools. Systems can be used in a variety of demanding fields that require microstructures. Typical applications include MEMS, Advanced Packaging, 3D Integration, LED production, Life Sciences, and Compound Semiconductor.
According to Philippe Flückiger, Director of Operations at EPFL Center of MicroNanoTechnology (CMi), “The VPG 200 manufactured by Heidelberg Instruments Mikrotechnik GmbH will bring to CMi the high end performance Direct Laser Write capability that is really needed. Its stable, reproducible results and its process flexibility are a great match to the needs of our users. The equipment will be dedicated to state-of-the-art research in micro and nano fabrication. The CMi is a user based micro/nano fabrication facility that provides centralized cleanroom facilities for the all faculties of EPFL and is also accessed by local industry. We have more than 400 active users at any one time”.
About EPFL CMi: With over 350 laboratories and research groups on campus, EPFL is one of Europe’s most innovative and productive scientific institutions. Ranked top 3 in Europe and top 20 worldwide in many scientific rankings, EPFL has attracted the best researchers in their fields.
The School’s unique structure fosters trans-disciplinary research and promotes partnerships with other institutions. It continuously combines fundamental research and engineering. EPFL is Europe’s most cosmopolitan technical university. It receives students, professors and staff from over 120 nationalities. With both a Swiss and international calling, it is therefore guided by a constant wish to open up; its missions of teaching, research and partnership impact various circles: universities and engineering schools, developing and emerging countries, secondary schools and gymnasiums, industry and economy, political circles and the general public.
About Heidelberg Instruments, GmbH: With an installation base in over 40 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Phone: +49 6221 3430 0