Heidelberg Instruments announced order for an advanced VPG maskless lithography system from Japan
Heidelberg, Germany, January 09, 2014: Heidelberg Instruments, GmbH, a leading supplier of maskless aligner and laser lithography systems, announced order for an advanced VPG maskless lithography system from a major Japanese based photomask production group.
VPG 800 is capable of patterning an area of up to 800 mm by 800 mm and is configured to produce sub-micron structures at a high throughput with an address grid of 10 nm. System will be used for production of advanced photomasks used in fabrication of MEMS and Micro Optics devices, as well as Touch Panel Screens.
“We are very excited about this contract, first major VPG order by a Japanese manufacturer. Prior to the financial crises, Japan was a major market for our production tools and in the past few months we have seen some positive signs pointing to recovery in capital equipment spending by the world’s third-largest economy. VPG systems have become the leading solution for large area lithography in other regional countries and we hope to duplicate the same success in Japan. ”, states Alexander Forozan, Head of Global Sales and Business Development
About Heidelberg Instruments, GmbH: With an installation base in over 40 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.