Heidelberg Instruments announced order for an advanced VPG maskless lithography system from Japan
Heidelberg, Germany, August 14, 2015: Heidelberg Instruments, GmbH, a leading supplier of maskless aligner and laser lithography systems, announced order for an advanced VPG maskless lithography system from a major Japanese based photomask production group.
VPG 800 is capable of patterning an area of up to 800 mm by 800 mm and is configured to produce sub-micron structures at a high throughput with an address grid of 10 nm. System will be used for production of advanced photomasks used in fabrication of MEMS and Micro Optics devices, as well as Touch Panel Screens.
“We are very excited about this contract by a Japanese based advanced manufacturer. Japan continues to be a major market for our production tools and we have seen some positive signs pointing to recovery in capital equipment spending by the world's third-largest economy.” states Alexander Forozan, Head of Global Sales and Business Development
About Heidelberg Instruments, GmbH: With an installation base of over 600 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
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