Dalian Institute of Chemical Physics Selects Heidelberg Instruments Maskless Aligner System for Advanced Semiconductor-based Materials for Photocatalysis and Photovotaic cells
Heidelberg, Germany, February 6, 2013: Heidelberg Instruments announced the sale of a µPG 501 table top maskless aligner system to the Dalian Institute of Chemical Physics, Dalian, China. Designed with the focus on high performance at an affordable price, the
μPG 501 maskless aligner system is an ideal solution for prototyping various devices such as MEMS, integrated Optics, microfluids, Lab-on-a-Chip, as well as other advanced fabrication research. The system has the ability to write structures down to1μm at a fast speed, replacing the traditional mask aligner systems. With a footprint of only 60 x 75 cm² the μPG 501 comes with a wide range of capabilities. Dalian Institute of Chemical Physics will use the maskless aligner system for advanced research in semiconductor-based materials for photocatalysis and photovotaic cells.
About Heidelberg Instruments, GmbH: With an installation base in over 40 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.